发明名称 ADJUSTMENT METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an inclination detection method for easily detecting the inclined state of an imaging surface by simple configurations. <P>SOLUTION: The adjustment method includes: an inclination detection process of detecting the inclined state of each of two imaging apparatuses; an inclination adjustment process of adjusting the inclination of the imaging apparatus; a location detection process of detecting the location of the imaging apparatus; a location adjustment process of adjusting the location of the imaging apparatus. The inclination detection process is characterized to image each of patterns set with equal intervals by successively changing the focal position of the imaging apparatus, and to set a pattern area by detecting the pattern position in the pickup image, and to detect the luminance value of each pixel in the pattern area, and to calculate luminance changing amounts between the pixels along the direction of inspection, and to calculate the integrated value of luminance changing amounts in each pattern area, and to detect the focal coincident position corresponding to the pickup image whose integrated value becomes the maximum, and to detect the inclined state of the imaging apparatus based on the focal coincident position. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012068188(A) 申请公布日期 2012.04.05
申请号 JP20100214846 申请日期 2010.09.27
申请人 SEIKO EPSON CORP 发明人 TSUTSUI HIDEFUMI
分类号 G01B11/26;G01N21/956;H01L21/027 主分类号 G01B11/26
代理机构 代理人
主权项
地址