DIFFRACTIVE PHOTO MASKS AND METHODS OF USING AND FABRICATING THE SAME

摘要

An exemplary embodiment of the present invention provides a diffractive photo-mask comprising a body element, a plurality of interference/image-forming hologram gratings, and a zero-order beam blocking element. The plurality of interference/image-forming hologram gratings can be located on or in the body element. The plurality of interference/image-forming hologram gratings are configured to diffract a light beam to produce one or more functional elements surrounded by a high-spatial-frequency periodic optical-intensity distribution at a substrate plane when the light beam is incident upon the diffractive photo-mask. The zero-order beam blocking element is configured to block zero-order diffracted beams when the light beam is incident upon the diffractive photo-mask