| 摘要 |
<p>When setting a spatial filter, it has been necessary for an operator to repeatedly carry out visual confirmation of a scanned image and adjust said spatial filter. The setting state has also been operator-dependent. A scattered light image (a beam image) and a diffracted light image (a Fourier image) are simultaneously observed, and each intensity profile of the scattered light image (the beam image) and the diffracted light image (the Fourier image) is also simultaneously monitored. One and only one spatial filter is scanned in the visual range of the diffracted light image, and the state change versus the intensity profile when the spatial filter is not inserted is detected. The spatial filter setting condition is determined on the basis of the detected state change.</p> |
