| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of a foreign matter inspection even for an area near a bottom surface of an object to be inspected and the whole of the object to be inspected. <P>SOLUTION: The X-ray inspection device comprises: an inspection table 711 for conveying an object B to be inspected; an X-ray source 200 for irradiating the object B to be inspected conveyed by the inspection table 711 with X-rays; and a line sensor 400 for detecting the X-rays applied from the X-ray source 200. Then, the X-ray source 200 is arranged so that an angle (θ1), between a horizontal conveyance surface of the inspection table 711, and an X-ray incident onto a point G which is an intersection point of the horizontal conveyance surface of the inspection table and a position P which is a position in a conveyance area of the object B to be inspected and which is the farthest from the X-ray source 200, is above 0° and is 30° or below. <P>COPYRIGHT: (C)2012,JPO&INPIT |
