| 发明名称 |
STAGE DEVICE, GANTRY TYPE STAGE DEVICE, AND METHOD FOR CONTROLLING STAGE DEVICE |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To correct the parallelism of a beam with respect to a table. <P>SOLUTION: The stage device includes: a table 14 on the top surface of which the workpiece is placed; a pair of Z axis driving mechanisms 20 at both sides of a table 14; a beam 18 bridged between a pair of the Z axis driving mechanisms 20 above the table 14; and a pair of rotation supports 46 for rotatably supporting both ends of the beam 18 relative to a pair of the Z axis driving mechanisms 20. <P>COPYRIGHT: (C)2012,JPO&INPIT |
| 申请公布号 |
JP2012066381(A) |
申请公布日期 |
2012.04.05 |
| 申请号 |
JP20110244380 |
申请日期 |
2011.11.08 |
| 申请人 |
SUMITOMO HEAVY IND LTD |
发明人 |
KOBAYASHI YUJI;NAKAMORI YASUHITO |
| 分类号 |
B23Q1/58;B23Q1/64 |
主分类号 |
B23Q1/58 |
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