| 摘要 |
<P>PROBLEM TO BE SOLVED: To further uniformly share a load between a plurality of compressors of a cryopump system. <P>SOLUTION: This cryopump system 1000 includes a plurality of cryopumps 10, a plurality of compressor units 102 and 104 respective operated in parallel in response to control output for supplying working gas to the plurality of cryopumps 10 and a cryopump controller 100 for determining the control output to the plurality of respective compressor units 102 and 104. The cryopump controller 100 adjusts a preset value used for determining the control output on at least one compressor unit 102 and 104 so as to level an operation state of the respective compressor units 102 and 104. <P>COPYRIGHT: (C)2012,JPO&INPIT |
