| 摘要 |
PURPOSE: An apparatus for inspecting defects is provided to remove unnecessary noise from inspection image of defects because a target image using the light of relevant wave length does not get influenced by light of other wave lengths. CONSTITUTION: An apparatus for inspecting defects comprises a first light source(110), a second light source(120), a first camera(130), a second camera(140), a dichroic mirror(150), and an image processing part(160). The first light source makes light of first wave length irradiate to a target object(10). The second light source irradiates light of second wave length shorter than the first wave length to the target object. The first camera gets image of the target object using the light reflected by the target object after irradiating from the first light source. The second camera gets image of the target object using the light reflected by the target object after irradiating from the second light source. The dichroic mirror gets the light reflected by the target object after irradiating the first or the second light source. The image processing part combines the images getting from the first and second cameras by arranging the images by turns.
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