发明名称 |
A SUBSTRATE TRANSFERRING DEVICE IN COATING REGION AND A COATING APPARATUS HAVING THE SAME |
摘要 |
PURPOSE: A substrate transport apparatus of a coating region and a coating apparatus including the same are provided to apply a coating solution on a substrate with a fixed thickness by preventing influences due to levitation force and suction force through a transfer plate. CONSTITUTION: A transfer plate(220) transfers a substrate on a floating unit of a coating region. A pair of first and second sliders(284a,284b) is arranged on both front and rear side surfaces of the transfer plate. The first and second sliders transfer the transfer plate. A pair of first connection members(202a) connects the transfer plate and the pair of first sliders. A pair of second connection members(202b) connects the transfer plate and the pair of second sliders.
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申请公布号 |
KR20120031993(A) |
申请公布日期 |
2012.04.04 |
申请号 |
KR20120025257 |
申请日期 |
2012.03.12 |
申请人 |
NARAENANOTECH CORPORATION |
发明人 |
KIM, MIN HO |
分类号 |
H01L21/677;B05C5/00;B65G49/06;H01L21/027 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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