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发明名称
摘要
申请公布号
FR2072115(A1)
申请公布日期
1971.09.24
申请号
FR19700043243
申请日期
1970.11.26
申请人
IBM
发明人
分类号
B26D1/553;B26D1/547;B28D5/04;H01L21/301;(IPC1-7):H01L7/00
主分类号
B26D1/553
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