发明名称 |
METHOD FOR PRODUCING CURABLE COMPOSITION FOR IMPRINTS |
摘要 |
PURPOSE: A manufacturing method of a curable composition is provided to manufacture a curable composition for imprint capable of restraining pattern separation at separating mold, and having excellent pattern transfer ability. CONSTITUTION: A manufacturing method of a curable composition comprises a step of penetrating a polymerizable monomer and a curable composition containing a polymerization initiator into a filter with effective filtering area wider than 200 cm^2 at least once or more. A forming method comprises: a step of manufacturing the curable composition for imprint through the manufacturing method; a step of applying the curable composition for imprint to a substrate; a step of pressure-welding mold to the curable composition for imprint; and a step of irradiating light.
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申请公布号 |
KR20120031908(A) |
申请公布日期 |
2012.04.04 |
申请号 |
KR20110096849 |
申请日期 |
2011.09.26 |
申请人 |
FUJIFILM CORPORATION |
发明人 |
ENOMOTO YUICHIRO;KODAMA KUNIHIKO;TARUTANI SHINJI |
分类号 |
C08J3/00;B01D37/00;B29C59/02;C08L101/00 |
主分类号 |
C08J3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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