发明名称 SEMICONDUCTOR TEST SYSTEM
摘要 A semiconductor test system includes a semiconductor test apparatus for providing a test signal to a device under test and performing a test on the device under test, a performance board for electrically coupling the semiconductor test apparatus and the device under test and a conveyance apparatus for conveying the device under test to electrically couple the device under test to the performance board. The conveyance apparatus includes a box for containing the performance board therein and a conveyance arm for conveying the device under test in order to press the device under test to the performance board and pressing the performance board to an inner face of the box via the device under test, so that a rear face of the performance board is pressed to the box, wherein the rear face corresponds to a position to which the device under test is pressed.
申请公布号 KR101133292(B1) 申请公布日期 2012.04.04
申请号 KR20067004624 申请日期 2004.09.08
申请人 发明人
分类号 H01L21/66;G01R31/28 主分类号 H01L21/66
代理机构 代理人
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