发明名称 Techniques for changing temperature of a platen
摘要 Techniques for changing temperature of a platen are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for changing temperature of a platen comprising a platen and one or more movable thermal pads comprising one or more thermal fluid channels to carry a thermal fluid configured to affect a temperature of the platen.
申请公布号 US8149256(B2) 申请公布日期 2012.04.03
申请号 US20080132939 申请日期 2008.06.04
申请人 FISH ROGER B.;BARSKY SAMUEL M.;HOLDEN SCOTT C.;RIAF ARTHUR P.;ANELLA STEVEN M.;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 FISH ROGER B.;BARSKY SAMUEL M.;HOLDEN SCOTT C.;RIAF ARTHUR P.;ANELLA STEVEN M.
分类号 H01J37/08 主分类号 H01J37/08
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