发明名称 |
Techniques for changing temperature of a platen |
摘要 |
Techniques for changing temperature of a platen are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for changing temperature of a platen comprising a platen and one or more movable thermal pads comprising one or more thermal fluid channels to carry a thermal fluid configured to affect a temperature of the platen. |
申请公布号 |
US8149256(B2) |
申请公布日期 |
2012.04.03 |
申请号 |
US20080132939 |
申请日期 |
2008.06.04 |
申请人 |
FISH ROGER B.;BARSKY SAMUEL M.;HOLDEN SCOTT C.;RIAF ARTHUR P.;ANELLA STEVEN M.;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
FISH ROGER B.;BARSKY SAMUEL M.;HOLDEN SCOTT C.;RIAF ARTHUR P.;ANELLA STEVEN M. |
分类号 |
H01J37/08 |
主分类号 |
H01J37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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