发明名称 |
Vacuum divider for differential pumping of a vacuum system |
摘要 |
A vacuum divider is positioned between rotor blades of a turbo-molecular pump and a vacuum manifold formed from multiple vacuum chambers. A first coupling aperture passes through the vacuum divider and allows gas to pass from a first of the multiple vacuum chambers to the turbo-molecular pump. A second coupling aperture passes through the vacuum divider and allows gas to pass from a second of the multiple vacuum chambers to the turbo-molecular pump. |
申请公布号 |
US8147222(B2) |
申请公布日期 |
2012.04.03 |
申请号 |
US20070749083 |
申请日期 |
2007.05.15 |
申请人 |
MORDEHAI ALEXANDER;WERLICH MARK;AGILENT TECHNOLOGIES, INC. |
发明人 |
MORDEHAI ALEXANDER;WERLICH MARK |
分类号 |
F04B35/04 |
主分类号 |
F04B35/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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