| 摘要 |
PURPOSE: A micro processing method, a micro processing device, and a recording medium recording a micro processing program are provided to prevent the uncharged state of resist drops at a pattern recessed part of a template. CONSTITUTION: A micro processing method is as follows. The quantity of resists required for each first section of a patterned surface is determined(S10). The total quantity of the resists required for an entire section of the patterned surface is determined(S20). The total quantity of the resists is divided by the capacity of resist drops, and the total number of the resist drops is determined(S30). The provisional position of each resist drop on the patterned surface is determined(S40). Each first section is assigned to the resist drops, and the resist drops form second sections on the patterned surface. The capacity of the resist drops of the second sections is divided by the total quantity of the resists of the first sections. If the distribution of the divided value is within a target range(S70), the positions of the resist drops are determined(S80). |
