| 摘要 |
The present invention proposes a method of readily and reliably forming CNTs independent of a substrate allowing a catalyst metal to deposit thereon, or an underlying material, even for the case where the substrate is not used, in which a titanium-cobalt composite particles are deposited, using a catalyst particle production system, on an insulating film formed on a silicon substrate, and CNTs are grown from the from titanium-cobalt composite particles by the CVD process.
|
