发明名称 Magnetic tunnel junction (MTJ) formation with two-step process
摘要 A method of manufacturing a magnetic memory element includes the steps of performing a first etching an oxide layer is etched, using a first photo-resist, the oxide layer formed on top of a contact layer that is formed on top of a magneto tunnel junction (MTJ), depositing a second photo-resist and second etching to leave a portion of the contact layer used to suitably connect the MTJ to circuits outside of the magnetic memory element.
申请公布号 US8148174(B1) 申请公布日期 2012.04.03
申请号 US201113100048 申请日期 2011.05.03
申请人 ABEDIFARD EBRAHIM;KESHTBOD PARVIZ;AVALANCHE TECHNOLOGY, INC. 发明人 ABEDIFARD EBRAHIM;KESHTBOD PARVIZ
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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