发明名称 |
Acid block for hybrid silicon device processing compatible with low-loss waveguides |
摘要 |
An acid-stop structure for a rib waveguide comprises a fin structure formed between the sidewalls in each rib channel of the rib waveguide, thereby preventing acids and other etchants from flowing down the rib channel and under a die that has been bonded to a wafer. |
申请公布号 |
US8150228(B2) |
申请公布日期 |
2012.04.03 |
申请号 |
US20080346779 |
申请日期 |
2008.12.30 |
申请人 |
JONES RICHARD;FANG ALEXANDER W. |
发明人 |
JONES RICHARD;FANG ALEXANDER W. |
分类号 |
G02B6/10;G02B6/00 |
主分类号 |
G02B6/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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