DIVIDING METHOD OF RESIN-ATTACHED BRITTLE MATERIAL SUBSTRATE

摘要

PURPOSE: A method for splitting a resin-attached brittle material substrate is provided to improve the dimensional precision of split pieces of a brittle material substrate by accurately extending cracks in a vertical direction. CONSTITUTION: A method for splitting a resin-attached brittle material substrate comprises the steps of: forming grooves(G) in a predetermined split position of the resin side of a resin-attached brittle material substrate(10), forming a scribe line in a predicted split position of the substrate side of the resin-attached brittle material substrate, and splitting the resin-attached brittle material substrate along the scribe line.