| 摘要 |
<p>Deposition of composite thin films. The substrate is mounted in a holder which can be rotated to a suitable angle of incidence of the vapours of two components released from a coaxial isothermal source i.e. one component releasing its vapour through an inner nozzle and the other through an outer annulus. The relative areas of these apertures are determined by the stoichiometry of the desired compound, the molecular weghts, atomic numbers and vapour pressures of the component materials, the equation being given. Typically a cadmium sulphide film is formed using separate sulphur and cadmium sources in the coaxial nozzle.</p> |
