发明名称 Piezoelectric actuator and electronic apparatus
摘要 Piezoelectric actuator (51) includes a piezoelectric element (11) that performs expansion/contraction movement in accordance with the state of an electrical field, a base (21) with the piezoelectric element (11) adhered to one surface thereof, and a support member (46) for supporting the piezoelectric element (11) and the base (21), the piezoelectric element (11) and base (21) vibrating up and down in accordance with the expansion/contraction movement of the piezoelectric element (11). The base (21) is connected to the support member (46) by way of a vibration film (31) having less rigidity than the base (21). In addition, the piezoelectric element (11) and support member (46) have different outline shapes.
申请公布号 US8148876(B2) 申请公布日期 2012.04.03
申请号 US20080522850 申请日期 2008.01.09
申请人 ONISHI YASUHARU;SASAKI YASUHIRO;TAKAHASHI MASATAKE;MORI UKYO;MURATA YUKIO;TOKI NOZOMI;YOKOYAMA YUKIO;NEC CORPORATION 发明人 ONISHI YASUHARU;SASAKI YASUHIRO;TAKAHASHI MASATAKE;MORI UKYO;MURATA YUKIO;TOKI NOZOMI;YOKOYAMA YUKIO
分类号 H01L41/09 主分类号 H01L41/09
代理机构 代理人
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