发明名称 Copper bonding method
摘要 A copper bonding compatible bond pad structure and associated method is disclosed. The device bond pad structure includes a buffering structure formed of regions of interconnect metal and regions of non-conductive passivation material, the buffering structure providing buffering of underlying layers and structures of the device.
申请公布号 US8148256(B2) 申请公布日期 2012.04.03
申请号 US20090541881 申请日期 2009.08.14
申请人 HEBERT FRANCOIS;BHALLA ANUP;ALPHA AND OMEGA SEMICONDUCTOR INCORPORATED 发明人 HEBERT FRANCOIS;BHALLA ANUP
分类号 H01L21/44 主分类号 H01L21/44
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