发明名称 |
Dynamic mode AFM apparatus |
摘要 |
A dynamic mode AFM apparatus for allowing high-speed identification of atoms of a sample surface, which comprises a scanner for performing three-dimensional scanning; an AC signal of a resonance frequency in a mode with flexural vibration of a cantilever; an AC signal of a second frequency which is lower than the frequency of the flexural vibration; a probe-sample distance modulated with the second frequency; a detector for detecting fluctuation of the resonance frequency; a detector for detecting vibration of the cantilever; and a detector for detecting a fluctuation component which is contained in a detected signal by detecting the resonance frequency fluctuation and synchronized with a modulation signal of the probe-sample distance, wherein an inclination of the resonance frequency against the probe-sample distance is obtained from the strength and polarity of the fluctuation component.
|
申请公布号 |
US8151368(B2) |
申请公布日期 |
2012.04.03 |
申请号 |
US20090990070 |
申请日期 |
2009.04.08 |
申请人 |
KAWAKATSU HIDEKI;KOBAYASHI DAI;JAPAN SCIENCE AND TECHNOLOGY AGENCY |
发明人 |
KAWAKATSU HIDEKI;KOBAYASHI DAI |
分类号 |
G01B5/28;G01Q60/34 |
主分类号 |
G01B5/28 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|