发明名称 |
METHOD OF ENHANCING THE CONDUCTIVE AND OPTICAL PROPERTIES OF DEPOSITED INDIUM TIN OXIDE (ITO) THIN FILMS. |
摘要 |
<p>Certain example embodiments of this invention relate to a method of activating an indium tin oxide (ITO) thin film deposited, directly or indirectly, on a substrate. The ITO thin film is baked in a low oxygen environment at a temperature of at least 450 degrees C for at least 10 minutes so as to provide for (1) a post-baked resistivity of the ITO thin film that is below a resistivity of a corresponding air-baked ITO thin film, (2) a post-baked visible spectrum absorption and transmission of the ITO thin film that respectively are below and above the absorption and transmission of the corresponding air-baked ITO thin film, and (3) a post-baked infrared reflectivity of the ITO thin film that is above the reflectivity of the corresponding air- baked ITO thin film. The substrate with the activated ITO thin film may be used in a photovoltaic device, for example.</p> |
申请公布号 |
MX2011012553(A) |
申请公布日期 |
2012.04.02 |
申请号 |
MX20110012553 |
申请日期 |
2010.05.13 |
申请人 |
GUARDIAN INDUSTRIES CORP. |
发明人 |
BROADWAY, DAVID, M.;LU, YIWEI |
分类号 |
H01L31/18;H01L31/0224 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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