| 摘要 |
PURPOSE: An optical complex diagnosis measuring system and method are provided to reduce measuring time and processes by obtaining real-time data for correction during measurement and correcting the signal of an interferometer. CONSTITUTION: An optical complex diagnosis measuring system comprises an electric stage(10), an interferometer(20), an objective lens(30), an optical system(40), an auto-focusing device, and a main controller(60). The electric stage, in which a measurement object is placed, transfers the measurement object in the direction vertical to a laser beam. The interferometer irradiates the laser beam to the surface of the measurement object, receives the light reflected of the measurement object, and outputs an interference signal based on the surface state and optical characteristics of the measurement object. The objective lens focuses the laser beam irradiated by the interferometer to the surface of the measurement object. The optical system guides the laser beam from the interferometer to the objective lens and the reflected light to the interferometer and the auto-focusing device. The auto-focusing device detects the reflected light guide by the optical system and implement auto-focusing to match the focus of the laser beam to the surface of the measurement object. The main controller obtains information on the surface state and optical characteristics of the measurement object.
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