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发明名称
SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号
KR101132237(B1)
申请公布日期
2012.03.30
申请号
KR20100020934
申请日期
2010.03.09
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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