Transfer Chamber having Plate for Heat Exchange and Semiconductor Fabrication Equipment having The same,申请号KR20090102204-传众专利搜索

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发明名称	Transfer Chamber having Plate for Heat Exchange and Semiconductor Fabrication Equipment having The same
摘要
申请公布号	KR101130558(B1)	申请公布日期	2012.03.30
申请号	KR20090102204	申请日期	2009.10.27
申请人		发明人
分类号	H01L21/68;H01L21/677	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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