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发明名称
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM
摘要
申请公布号
KR101132487(B1)
申请公布日期
2012.03.30
申请号
KR20097018799
申请日期
2008.03.04
申请人
发明人
分类号
H01L21/3205;H01L21/302;H01L21/768
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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