A PIEZOELECTRIC SENSOR AND A METHOD OF FABRICATING A PIEZOELECTRIC SENSOR
摘要
<p>A piezoelectric sensor comprising a piezoelectric film formed on a surface of an object to be monitored; a plurality of electrodes formed on a surface of the piezoelectric film; and wherein electrical polarization of the piezoelectric film is about coplanar with the surface of the piezoelectric film. A method of forming a piezoelectric sensor. The method comprises forming a piezoelectric film on a surface of an object to be monitored; forming electrodes on a surface of the piezoelectric film; and orientating electrical polarization in the piezoelectric film to be about coplanar with the surface of the piezoelectric film.</p>
申请公布号
SG178326(A1)
申请公布日期
2012.03.29
申请号
SG20120008876
申请日期
2010.08.13
申请人
AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
发明人
YAO, KUI;TAN, CHIN, YAW;GAUNEKAR, AJIT, S.;NG, HON, YU, PETER