| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a durable stamper that follows a locally projection of a substrate to be transferred, reduces a pattern-transfer poor region, and also to provide a transferring method. <P>SOLUTION: A stamper for imprinting having an unevenness shape formed on a surface thereof includes: a pattern layer on which the unevenness shape is formed and which is made of resin; a buffer layer which is arranged on a back surface of the pattern layer and is made of resin; and a base material layer which is arranged on the back surface of the buffer layer. The Young's modulus of the buffer layer is smaller than that of the pattern layer, and the Young's modulus of the base material layer is larger than that of the buffer layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
