发明名称 |
SYSTEMS HAVING INTEGRATED MECHANICAL RESONATING STRUCTURES AND RELATED METHODS |
摘要 |
Devices including integrated components are described. The components may be integrated by being formed on a single substrate. The components may be integrated by being formed on separate chips within a multi-chip module. The components being integrated may include mechanical resonating structures, which in some instances may be piezoelectric mechanical resonating structures. |
申请公布号 |
US2012074818(A1) |
申请公布日期 |
2012.03.29 |
申请号 |
US201113191851 |
申请日期 |
2011.07.27 |
申请人 |
CROWLEY MATTHEW J.;ZOLIAGHARKHANI GUITI;SCHOEPF KLAUS JUERGEN;SAND9, INC. |
发明人 |
CROWLEY MATTHEW J.;ZOLIAGHARKHANI GUITI;SCHOEPF KLAUS JUERGEN |
分类号 |
H01L41/053 |
主分类号 |
H01L41/053 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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