Operation method of particle beam microscope e.g. electron microscope, involves determining surface model of microscope structure depending on light beams emanating from structure, and position and orientation of surface model

摘要

The light rays emanating from a structure comprising the surface of an object and/or portion of a surface of an object holder are detected. The surface model of structure (90) is calculated depending on the detected light beams. The position and orientation of surface model of structure relative to the object region are determined. The measurement point (P) is determined relative to surface of the model structure, and the object is positioned depending on the surface model, the position and orientation of surface model and the particular measurement location. Independent claims are included for the following: (1) computer program product for operating particle beam microscope; and (2) particle beam microscope system.