| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemical liquid measuring device which keeps the supply amount of measured chemical liquid to be uniform without limitation of an arrangement layout. <P>SOLUTION: The chemical liquid measuring device 10 includes: a metering tank 1 for measuring the specified amount of chemical liquid; an overflow tank 2 for storing the overflowed chemical liquid which exceeds the specified amount; and an overflow pipe 12 of which one end 12a is arranged in a position corresponding to a water surface of the chemical liquid indicated by the virtual line and the other end 12b is communicated with the overflow tank 2, and which transfers the overflowed chemical liquid from the metering tank 1 to the overflow tank 2, when the specified amount of the chemical liquid is supplied to the metering tank 1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
