DEFECT DIMENSION MEASURING APPARATUS, DEFECT DIMENSION MEASUREMENT METHOD, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To exactly measure dimensions of a defect of a test object with level difference to the optical axis direction of an imaging apparatus.

SOLUTION: A plane coordinate acquisition part 302 acquires plane coordinates of pixels showing the defect of the test object included in image data. A space coordinate conversion part 305 converts the plane coordinates acquired by the plane coordinate acquisition part 302 into space coordinates showing an intersection point between the surface of a three-dimensional model showing appearance of the test object arranged in a virtual space and a straight line on the virtual space corresponding to a point shown by the plane coordinates. A virtual dimension calculation part 307 calculates the dimensions of the defect in the virtual space using a plurality of space coordinates converted by the space coordinate conversion part 305.

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