CRYOPUMP SYSTEM AND CONTROL METHOD THEREOF

摘要

PURPOSE: A cryopump system and a control method thereof are provided to share loads with multiple compressors equally. CONSTITUTION: A cryopump system comprises multiple cryopumps(10), multiple compressor units(102,104), and a controller(100). The compressor units are parallely operated according to control output in order to supply operating gas to the cryopump. The controller decides the control output with respect to each of the multiple compressor units. The controller controls setting value which is used to decide the control output with respect to at least one of the compressor units in order to be standardized operation state of each compressor unit.