SAWING APPARATUS OF SINGLE CRYSTAL THE SAME

摘要

PURPOSE: An apparatus for cutting a single crystal ingot is provided to improve the quality of nanotopography by stably supplying slurry when slurry flux is reduced. CONSTITUTION: A wire saw(220) cuts an ingot. A roller(210) runs the wire saw. A slurry nozzle part(230) supplies slurry to a wire. The slurry nozzle part is transferable according to the cutting degree of the ingot. The slurry nozzle part moves from near to far from the ingot or from side to side as the ingot is cut.