| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluorine-based surfactant which has low accumulative properties in environment and living bodies and is used as an excellent leveling agent and to provide a coating composition and a resist composition using the fluorine-based surfactant. <P>SOLUTION: The fluorine-based surfactant is used, which is a copolymer obtained by copolymerizing a monomer (A) having a 4C-6C fluorinated alkyl group (wherein, the alkyl group includes the one having an ether bond due to an oxygen atom) and a monomer (B) having a polyoxyalkylene chain and represented by general formula (2) as indispensable monomers. In formula, R is a hydrogen atom or a methyl group; X and Y are each an independent alkylene group; m and n are each an integer of 0 or 1 or more and the sum of m and n is 3 or more; and Z is a hydrogen atom or a 1C-6C alkyl group. <P>COPYRIGHT: (C)2012,JPO&INPIT |
