APPARATUS AND METHOD FOR PULLING SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and method for pulling a single crystal which can pull up the single crystal having a stable product quality by alternatively forming an expanded diameter part and reduced diameter part at a neck part, and preventing dislocation from a seed crystal to a straight body part.

SOLUTION: The apparatus for pulling the silicon single crystals includes: a neck diameter measuring means for measuring a diameter of the grown neck part; a first pulling rate compensation means 21 and 22 for outputting a first compensated pulling rate for the seed crystals based on a difference between a measured value of the neck part obtained by the neck diameter measuring means and a target value of the neck part diameter stored in a storage means beforehand; a second pulling rate compensation means 23 for outputting a second pulling rate, wherein an upper limit of the first pulling rate is limited to a first limit value; and a crucible rotation number compensation means 24 and 25 for reducing the rotation number of a crucible while the upper limit of the pulling rate is limited at least to the first limit value.

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