发明名称 TEMPERATURE MEASURING DEVICE, AND TEMPERATURE MEASURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a temperature measuring device and a temperature measuring method for easily measuring temperature of more measurement points. <P>SOLUTION: The temperature measuring device comprises: a light source; first demultiplexing means demultiplexing the light from the light source into m wavelength bands; m pieces of first branching means branching, for each of the m wavelength bands, the light from the first demultiplexing means into n light beams; transmission means transmitting the light beams from the m pieces of first branching means to each measuring point of measuring objects; light receiving means receiving the light beam reflected by each measuring point; and temperature calculation means calculating, based on the waveform of the light beam received by the light receiving means, the temperature of each measuring point. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012063149(A) 申请公布日期 2012.03.29
申请号 JP20100205401 申请日期 2010.09.14
申请人 TOKYO ELECTRON LTD 发明人 YAMAWAKI JUN;KOSHIMIZU CHISHIO;MATSUDO TATSUO;NAGAI KENJI
分类号 G01K5/52;H01L21/66 主分类号 G01K5/52
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