| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a height measurement instrument and height measurement method capable of measuring the height of a measurement area by reducing adverse effects caused by halation even when halation exists in the measurement area. <P>SOLUTION: The height measurement instrument includes: an image capture part for imaging image data by changing an imaging position in a height direction; a measurement area focus evaluation value measuring part for measuring a focus evaluation value of each height in the measurement area in the image data; a near-field region focus evaluation value measuring part for measuring a focus evaluation value of each height in a near-field region of the measurement area in the image data; and a measurement area height measuring part for measuring the height of the measurement area based on the focus evaluation value of each height in the near-field region and the focus evaluation value of each height in the measurement area. <P>COPYRIGHT: (C)2012,JPO&INPIT |
