| 摘要 |
In one aspect of the invention, an acoustic wave device includes a substrate, and at least one acoustic wave resonator having a bottom electrode adjacent to the substrate, a top electrode, a piezoelectric layer sandwiched between the bottom and top electrodes, a passivation layer formed on the top electrode, and a mass load layer sandwiched between the substrate and the bottom electrode, or between the bottom electrode and the piezoelectric layer.
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