发明名称 |
ADAPTER RING FOR SILICON ELECTRODE |
摘要 |
Methods and systems are provided for retrofitting wafer etching systems. The methods and systems use an adapter ring to retrofit wafer etching systems designed for use with multiple piece electrodes such that single piece electrodes can be used in the etching systems. A portion of the adapter ring is disposed in a receptacle formed in a thermal coupled plate in the wafer etching system. Another portion of the adapter ring is positioned in a channel formed in an upper electrode. |
申请公布号 |
WO2012040482(A2) |
申请公布日期 |
2012.03.29 |
申请号 |
WO2011US52786 |
申请日期 |
2011.09.22 |
申请人 |
MEMC ELECTRONIC MATERIALS, INC.;PARDE, TERRY |
发明人 |
PARDE, TERRY |
分类号 |
H01J37/32;C23C16/455 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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