摘要 |
A particulate matter sensor includes a ceramic rod, a first metal layer deposited on the ceramic rod, a ceramic layer deposited on the first metal layer, and a second metal layer deposited on the ceramic layer. The first metal layer serves as a source electrode, and the second metal layer serves as a detection electrode. In another embodiment, a particulate matter sensor includes a metal rod, a ceramic sheet deposited or wrapped around the ceramic rod, and a metal layer deposited on the ceramic layer or sheet. The metal rod serves as a source electrode, and the second metal layer serves as a detection electrode. |