| 摘要 |
Provided is a marking device which performs marking by irradiating marking light onto an object which moves at a predetermined speed and which is provided with a table (22), a position detector (4), a marking head portion (3), and a computer (90) for control. The table (22) moves the object at the predetermined speed. The position detector (4) moves synchronously with the table (22). The marking head portion (3) is a device for irradiating collimated light onto the position detector (4) and has a galvano-scanner (308S) which deflects the collimated light in accordance with the movement of the position detector (4). The computer (90) for control detects a change in the irradiation position of the collimated light irradiated onto the position detector (4). |
