| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card holding apparatus capable of preventing deformation of a probe card. <P>SOLUTION: In a test head 10B for testing electric characteristics of a semiconductor device formed on a wafer using a probe card 50B, the probe card holding apparatus for holding the probe card 50B includes a clamp head 57 formed in the center portion of the back face of the probe card 50B and a slide body 80 which is provided on the test head 10B and holds the probe card 50B by being engaged in the clamp head 57. <P>COPYRIGHT: (C)2012,JPO&INPIT |
