| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration element with excellent humidity resistance and a manufacturing method thereof. <P>SOLUTION: A manufacturing method of a piezoelectric vibration element polarizes a piezoelectric body 10 by applying a voltage to an element body 15 via a pair of electrodes 11 and 12. After a polarization step, the manufacturing method vibrates the element body 15 by applying an AC voltage to the element body 15 via the pair of electrodes 11 and 12. After starting a vibration step, the manufacturing method forms protection films 16a and 16b on at least a part of the surface of the element body 15. <P>COPYRIGHT: (C)2012,JPO&INPIT |
