| 摘要 |
<P>PROBLEM TO BE SOLVED: To install a plurality of spacers for mask protection on the surface of a chuck in a short time by a simple configuration. <P>SOLUTION: A chuck 10 includes a plurality of push-up pin units having push-up pins 12 lifted from the inside of the chuck 10 and motors 11 vertically moving the push-up pins 12, a mask 2 is conveyed to the chuck 10 by a mask conveying device, and the plurality of push-up pins 12 receive the mask 2 from the mask conveying device and mount it on a mask holder 20. A plurality of spacers 30, which support peripheral portions of a pattern surface of the mask 2 when the push-up pins 12 mounted with the mask 2 are lowered, are stored inside the chuck 10. When the push-up pins 12 mounted with the mask 2 are lowered, the respective spacers 30 emerge from inside the chuck 10 to the surface of the chuck 10, so as to prevent the pattern surface of the mask 2 from being brought into contact with the surface of the chuck 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
