| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve workability when an observer specifies an interesting region on a sample about a physical quantity such as a phase other than height in observation with SPM. <P>SOLUTION: A range indication image 34 indicating an observable range on a sample is displayed on a navigation window 33 in a sample observation display screen 30 and an interesting region setting indication frame 35 for indicating an enlarged observation range is displayed so as to be superposed to the image 34. A table of thumbnails of enlarged images acquired for the same sample up to now is displayed on an image history table display window 32, and when the observer selects and indicates an arbitrary image, a thumbnail of the image is mapped on the range indication image 34. When the observer changes the position, size and angle of the interesting region setting indication frame 35 by mouse operation while referring to the mapped thumbnail, an enlarged image on the sample corresponding to the changes is newly acquired. <P>COPYRIGHT: (C)2012,JPO&INPIT |
