发明名称 Nonvolatile Memory Device and Manufacturing Method Thereof
摘要 A nonvolatile memory device comprises a gate insulating layer, a floating gate and a dielectric layer sequentially formed over a semiconductor substrate, a capping layer formed over the dielectric layer, and a control gate formed over the capping layer, wherein the control gate includes nitrogen or carbon as an additive.
申请公布号 US2012074485(A1) 申请公布日期 2012.03.29
申请号 US201113312569 申请日期 2011.12.06
申请人 HAM CHUL YOUNG;JANG MIN SIK;LEE SANG SOO;HYNIX SEMICONDUCTOR INC. 发明人 HAM CHUL YOUNG;JANG MIN SIK;LEE SANG SOO
分类号 H01L29/788;H01L21/336 主分类号 H01L29/788
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