发明名称 EEPROM CELL
摘要 A method of forming a device is disclosed. The method includes providing a substrate prepared with a cell area separated by other active areas by isolation regions. First and second gates of first and second transistors in the cell area are formed. The first gate includes first and second sub-gates separated by a first intergate dielectric layer. The second gate includes a second sub-gate surrounding a first sub-gate. The first and second sub-gates of the second gate are separated by a second intergate dielectric layer. First and second junctions of the first and second transistors are formed. The method also includes forming a first gate terminal coupled to the second sub-gate of the first transistor and a second gate terminal coupled to at least the first sub-gate of the second transistor.
申请公布号 US2012074482(A1) 申请公布日期 2012.03.29
申请号 US20100888431 申请日期 2010.09.23
申请人 JUNG SUNG MUN;LIM KIAN HONG;YANG JIANBO;WOO SWEE TUCK;CHU SANFORD;GLOBALFOUNDRIES SINGAPORE PTE. LTD. 发明人 JUNG SUNG MUN;LIM KIAN HONG;YANG JIANBO;WOO SWEE TUCK;CHU SANFORD
分类号 H01L29/788;H01L21/336 主分类号 H01L29/788
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