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发明名称
LITHOGRAPHIC APPARATUS AND METHOD
摘要
申请公布号
KR20120031050(A)
申请公布日期
2012.03.29
申请号
KR20127000134
申请日期
2010.06.07
申请人
ASML NETHERLANDS B.V.
发明人
VAN SCHOOT JAN;DE VRIES GOSSE
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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